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Wet Etch Endpoint

Aep2  Endpoint for Wet Etch Processes

The Aep2  endpoint system is designed to provide  process control for standard wet processes.  The system is comprised
of robust manufacturing proven endpoint software combined with a reflectometer head which includes a light source and spectrometer. The optical sensor configuration varies depending on how it is  mounted to a specific tool type.  The operating principle is fairly simple. A light source is used to illuminate part of a wafer while it is etched.  The reflected light spectrum from the wafer changes based on film properties/thickness.  Lightwind software tracks the changes in reflected spectra and endpoints based on a preconfigured endpoint algorithm. 

Picture
Picture
Shown above is the end point simulator used to create an endpoint recipe.  The trace shows  the simulation of endpoint from actual process data during the wet etch of  Titanium   over thermal oxide. The steep drop shows the Ti as it clears. Endpoint can be called anywhere along the downward slope as well as when the signal goes stead state near zero. 
More information

  Endpoint for Copper Etch  (over Titanium)

Picture
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CONTACT US
  • L I G H T W I N D
  • SOLUTIONS
    • Semiconductor >
      • Thin Film Measurement
      • Plasma and CVD Gas Analysis >
        • L Series: Downstream Process Spectroscopy
        • S Series: Window Mount
      • Plasma and Wet Etch Process Endpoint >
        • Wet Etch Endpoint
    • Materials Analysis >
      • Reflectance
    • Chemical Analysis >
      • Gas Measurement
      • Absorption Spectroscopy
      • Fluorescence Spectroscopy
      • Raman >
        • Raman Products >
          • Portable Raman
          • PreConfigured Raman Systems
          • Automated Raman Systems
          • Raman Software
    • MultiSpectral Imaging >
      • Multispectral Example
      • Multispectral Imaging Resources
    • Education
    • Solar
    • BioScience
    • Food Science >
      • Food Science Resources
      • Comparison Of F Series Analyzers
    • Plasma Spectroscopy >
      • Plasma Spectroscopy Kits
      • Plasma Spectroscopy Systems
  • PRODUCTS
    • Spectrometers, Detectors, Fiber Optics
    • Fiber Optic Cables
    • Flow Cells
    • Lasers
    • Software >
      • Analyze IQ
      • Ocean Optics Software
  • SERVICES
    • OEM Components
    • Custom Engineering
  • RESOURCES
    • Lightwind Software Instructional Videos >
      • Configuring and Viewing Data
      • Template and Recipe Operations
      • Endpoint
  • CONTACT
    • ABOUT US
  • Category
  • Solara