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Plasma Emission Spectroscopy

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Plasma ...the fourth state of matter...is  used regularly in a variety of applications such as:
  • semiconductor processing
  • surface treatment
  • cleaning
  • surface stabilization
  • lighting   (fluorescent bulbs)
In general,  a plasma results from the breakdown of gases into reactive atoms and molecules. Changes in the atomic states, energy changes, result in the emission of light. The resulting wavelength is uniquely characteristic of that energy  change.
The wavelength (s)  is useful because it characterizes changes   both in the breakdown of the gases as well as   their concentrations.  The "concentration" change  can be used to characterize how a process is performing:
  • is it in a steady state
  • is it complete 
  • is it in control/out of control  
  • is the source power stable
There are a variety of ways to monitor optical emissions from a plasma, but the ccd based spectrometer  is the most utilitarian.
Updated  spectra across the range of interest can provide information at a rate   > 3 hz, essentially providing "real time" information
in most  common applications.  Lightwind has preconfigured two systems for non automated applications.  
For  industrial applications where plasma  emissions are used  24 x 7 to monitor/control/fault detect processes Lightwind has several solutions. 
If the application requires a more demanding solution there are  many additional choices  we can offer including  configured application specific spectrometers,  high resolution scanning monochromators, or even PMT centric choices for individual wavelengths.  Contact us if you have questions. 

 

Plasma Spectroscopy Kits Preconfigured

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We have configured  spectrometer kits which will cover most   plasma  applications. The kit   includes  preconfigured spectrometer, fiber optic cable and software.
More information

Lightwind Spectroscopy Systems

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These spectroscopy systems are designed for continuous monitoring, endpoint and   control of plasma processes. They include LIghtwind process and endpoint control software and can be interfaced to manufacturing systems. 
More information

Custom Configurations

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Plasma Spectroscopy Reference

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We can create custom configurations which might include different  (or multiple) plasma spectrometers,  or spectrometers  "tuned" for maximum application sensitivity
More information
This reference is a large downloadable plasma spectroscopy look up table which includes both species by wavelength and and wavelength by species table.   This is a free download.
Free Download
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Copyright © 2020
CONTACT US
  • L I G H T W I N D
  • SOLUTIONS
    • Semiconductor >
      • Thin Film Measurement
      • Plasma and CVD Gas Analysis >
        • L Series: Downstream Process Spectroscopy
        • S Series: Window Mount
      • Plasma and Wet Etch Process Endpoint >
        • Wet Etch Endpoint
    • Materials Analysis >
      • Reflectance
    • Chemical Analysis >
      • Gas Measurement
      • Absorption Spectroscopy
      • Fluorescence Spectroscopy
      • Raman >
        • Raman Products >
          • Portable Raman
          • PreConfigured Raman Systems
          • Automated Raman Systems
          • Raman Software
    • MultiSpectral Imaging >
      • Multispectral Example
      • Multispectral Imaging Resources
    • Education
    • Solar
    • BioScience
    • Food Science >
      • Food Science Resources
      • Comparison Of F Series Analyzers
    • Plasma Spectroscopy >
      • Plasma Spectroscopy Kits
      • Plasma Spectroscopy Systems
  • PRODUCTS
    • Spectrometers, Detectors, Fiber Optics
    • Fiber Optic Cables
    • Flow Cells
    • Lasers
    • Software >
      • Analyze IQ
      • Ocean Optics Software
  • SERVICES
    • OEM Components
    • Custom Engineering
  • RESOURCES
    • Lightwind Software Instructional Videos >
      • Configuring and Viewing Data
      • Template and Recipe Operations
      • Endpoint
  • CONTACT
    • ABOUT US
  • Category
  • Solara