• L I G H T W I N D
  • SOLUTIONS
    • Semiconductor >
      • Thin Film Measurement
      • Plasma and CVD Gas Analysis >
        • L Series: Downstream Process Spectroscopy
        • S Series: Window Mount
      • Plasma and Wet Etch Process Endpoint >
        • Wet Etch Endpoint
    • Materials Analysis >
      • Reflectance
    • Chemical Analysis >
      • Gas Measurement
      • Absorption Spectroscopy
      • Fluorescence Spectroscopy
      • Raman >
        • Raman Products >
          • Portable Raman
          • PreConfigured Raman Systems
          • Automated Raman Systems
          • Raman Software
    • MultiSpectral Imaging >
      • Multispectral Example
      • Multispectral Imaging Resources
    • Education
    • Solar
    • BioScience
    • Food Science >
      • Food Science Resources
      • Comparison Of F Series Analyzers
    • Plasma Spectroscopy >
      • Plasma Spectroscopy Kits
      • Plasma Spectroscopy Systems
  • PRODUCTS
    • Spectrometers, Detectors, Fiber Optics
    • Fiber Optic Cables
    • Flow Cells
    • Lasers
    • Software >
      • Analyze IQ
      • Ocean Optics Software
  • SERVICES
    • OEM Components
    • Custom Engineering
  • RESOURCES
    • Lightwind Software Instructional Videos >
      • Configuring and Viewing Data
      • Template and Recipe Operations
      • Endpoint
  • CONTACT
    • ABOUT US
  • Category
  • Solara

​ Metrology and Instrumentation for Semiconductor Processes

Photo:  Electronics Maker
Picture

CVD Process Control And Endpoint

CVD processes are critical and so are chamber cleans. Overcleaning a reactor shortens the life of a chamber, undercleaning can cause premature flaking and particulates/defects. Many CVD systems do not have process monitoring or endpoint capability.
More
Picture

ALD

ALD   precursors  are very expensive and cannot be monitored as effectively as standard process gases. Flow failure causes device failure, and using higher gas flows for a safety margin is very costly.  Using the L3 precursor flows can be optimized with significant cost saving.
More
Picture

Plasma Etch  Endpoint

An important  step in manufacturing is plasma etch. Accurate control of endpoint is critical for critical dimensions.  Both the L and Series can provide process endpoint for very small geometries.  In some cases such as contact etch an application specific spectrometer might be appropriate.
L Series: Remote Glow
S Series: Through Window
Picture
Picture

Wet Etch Endpoint

Wet etch is a significant part of the process flown in semiconductor manufacturing.  However, process control  relies on timed etch whose accuracy depends on careful control of batch chemistry. Being able to monitor the etch rate real time using the Aep 2 can have provide significant cost savings as well as better process control.
More information

Thin Film Measurement

Thin Film Measurement is a fundamental requirement for many semiconductor processes. The technique relies on the optical properties of transparent films to determine the films thickness.  Accurate measurements can be made for films from the 10nm range to the 100 micron range.
More Information
Picture
Copyright © 2020
CONTACT US
  • L I G H T W I N D
  • SOLUTIONS
    • Semiconductor >
      • Thin Film Measurement
      • Plasma and CVD Gas Analysis >
        • L Series: Downstream Process Spectroscopy
        • S Series: Window Mount
      • Plasma and Wet Etch Process Endpoint >
        • Wet Etch Endpoint
    • Materials Analysis >
      • Reflectance
    • Chemical Analysis >
      • Gas Measurement
      • Absorption Spectroscopy
      • Fluorescence Spectroscopy
      • Raman >
        • Raman Products >
          • Portable Raman
          • PreConfigured Raman Systems
          • Automated Raman Systems
          • Raman Software
    • MultiSpectral Imaging >
      • Multispectral Example
      • Multispectral Imaging Resources
    • Education
    • Solar
    • BioScience
    • Food Science >
      • Food Science Resources
      • Comparison Of F Series Analyzers
    • Plasma Spectroscopy >
      • Plasma Spectroscopy Kits
      • Plasma Spectroscopy Systems
  • PRODUCTS
    • Spectrometers, Detectors, Fiber Optics
    • Fiber Optic Cables
    • Flow Cells
    • Lasers
    • Software >
      • Analyze IQ
      • Ocean Optics Software
  • SERVICES
    • OEM Components
    • Custom Engineering
  • RESOURCES
    • Lightwind Software Instructional Videos >
      • Configuring and Viewing Data
      • Template and Recipe Operations
      • Endpoint
  • CONTACT
    • ABOUT US
  • Category
  • Solara