Our spectroscopy systems are designed for stand alone or integration with plasma systems. The L and S Series utilize Lightwind software which has been designed for continuous plasma monitoring. data logging and visualization. The spectrometer type, range, and resolution are application configurable.
Lightwind S Series
Available with different spectrometer types the standard system includes a spectrometer, fiber optic cable, software, and laptop. Digital I/O and interface is optional.
The Lightwind L Series is comprised of a plasma source, spectrometer and software. The L Series is installed on existing vacuum chambers, or in chamber exhaust lines, where the plasma source can provide an emission spectra for otherwise "dark" processes.