Plasma Spectroscopy Systems

Our spectroscopy systems are designed for stand alone or integration with plasma systems. The L and S Series utilize Lightwind  software which has been designed for continuous plasma monitoring.  data logging and visualization. The spectrometer type, range, and resolution are application configurable. 

Lightwind L Series: Optical RGA's

The Lightwind L Series is comprised of a plasma source, spectrometer and software. The L Series is installed on existing vacuum chambers, or in chamber exhaust lines, where the plasma source can provide an emission spectra for otherwise "dark" processes.  

Lightwind S Series

Available with different spectrometer types the standard system includes a spectrometer, fiber optic cable, software, and laptop.  Digital I/O and interface is optional.

You may also be interested in our Spectral Reference:

Spectral Emission Line Reference with Emphasis on Plasma Emissions

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