Lightwind Wet Etch Endpoint Aep 2

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The Lightwind Aep 2 is an add-on endpoint system for wet processing. Utilizing  optical reflectance spectroscopy, automated endpoint detection is now an option for  many wet processing applications.
​The Aep 2 is specifically designed to  improve wet etch process control, while offering  a measurement that adjusts to concentration changes in the bath. With time resolution of 1 second for endpoint, normal process variation and undercut are reduced and become more reproducible.  Etch for  many different films can be controlled by endpoint  (such as Ti/oxide, Cu/Ti) .
Benefits of endpoint control
Improved Process Control
  •   1 second resolution on measured wafer
  •   endpoint  is based on wafer clearing, so it automatically adjusts
              to  changes in bath concentrations and temperature
  •   undercut associated with overetch is reduced
  •   endpoint allows more tolerance to batch chemistry variations
Cost savings
  •   automated endpoint minimizes process time associated with
              fixed time processes, allowing higher throughput
  •   increased throughput, or simply  reduced process time reduces
              chemical costs and disposal costs
  •   reduction in number of test  wafers required
Non Invasive
  •   endpoint hardware can be mounted outside the bath or process    
              enclosure in most cases

​System Specification
Sensor Head   Typically very small, configured to be tool specific
                          Consists  of a light source and light detector
Light source    Vis -NIR  Optimized for films of interest
                          Lifetime Projected 10,000 hours or  1/ year maintenance
                        
Spectrometer Vis / NIR  Multichannel >500 pixel array for multiple
                          active wavelengths   Resolution ~ 2  microns
                          Sample rate: variable depends on light but can be
                          as little as 10 milliseconds
Computer       OS  Windows  x64
                          Touch screen interface
                          500 GB SSD Hybrid Hard drive or 250 SSD
                          Work station compatible
Software          Lightwind  endpoint and data logging software
                          includes endpoint simulator, strip chart recording
                          data logging for selected channels or full spectra. 
                          Output for ethernet/factory link.
Power Requirements 
                          Light source    ~ 1 amp @ 120 volts
                          Spectrometer   ~.25 amp @ 5 volts ( powered by
                            computer)
                          Computer  < 200 watts @ 120  volts
                          Warranty  One year  on system, two years on  spectrometer