Lx Residual Gas Analyzer
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The Lx is an optical residual gas analyzer that operates from 8 x 10 - 8 to 1 x 10 - 2 Torr. A ccd spectrometer is used for identification of gases/concentrations and the information can be used for process troubleshooting, leak detection, and process monitoring. The Lx is a complete spectroscopy system but can also be an upgrade to select pressure sensors. It is a replacement for an RGA for gas analysis with the benefit that there is no filament: it is not affected by many of the reliability problems of standard RGAa.
