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​Lightwind Software Instructional Videos:  Endpoint Simulation and Test

​(Dependent on the version, Lightwind software screens may appear slightly different.  Operation and function are the same however.)
The Lightwind Endpoint SImulator is  designed to load a  full spectral data file so that different wavelengths can be tested as possible endpoint candidates.  Different endpoint algorithms provide choices of techniques that offer the most robust control. It is recommended that endpoint simulations are run on more than one sample to provide a statistically significant sampling of process variation.

Endpoint Operations

Open the Endpoint Simulator

Save the Endpoint Simulation to Template

​Manual Endpoint Realtime Test

Endpoint Setup: Absolute Threshold Mode

Selecting the Wavelength for Endpoint

% Change in Overetch

Absolute Threshold  Increasing Endpoint

Decreasing Endpoint

Endpoint setup with Slope Mode (2nd Derivative)

Decreasing Slope

Increasing Slope

Picture
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CONTACT US
  • L I G H T W I N D
  • SOLUTIONS
    • Semiconductor >
      • Plasma and Wet Etch Process Endpoint >
        • Wet Etch Endpoint
    • Plasma Spectroscopy >
      • Plasma Spectroscopy Systems
  • PRODUCTS
    • Plasma, CVD, ALD Gas Analysis >
      • L Series Applications
      • L Series: Downstream Process Spectroscopy
      • Lx Residual Gas Analyzer
      • S Series: Window Mount
    • Flow Cells
    • Software
  • RESOURCES
    • Lightwind Software Instructional Videos >
      • Configuring and Viewing Data
      • Template and Recipe Operations
      • Endpoint
  • SERVICES
    • Custom Engineering
  • CONTACT
    • ABOUT US