Lightwind started in 2001 with the introduction of its first product, the L3, designed to provide critical chemical information about vacuum based semiconductor processes. The L3 uses a plasma source to ionize process gases coupled with spectroscopy to identify and monitor them. One process critical application is Atomic Layer Deposition where incomplete deposition of three or four Angstroms may mean device failure. Designed to operate with a continuous plasma the L3 has accumulated more than 400,000 mfg hours in ALD alone.
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S2 designed for window access to existing plasma processes. This allows adding endpoint capability or even upgrading sensitivity for existing processes.
The Lx was introduced in 2026 as a compliment to the L3. The Lx replaces standard RGA's -which use ion fragmentation- with an
optical emission spectrometer.. Since it does not use a filament the reliability is significantly improved while adding much better chemical resistance in many gas environments. The L3 operates at pressures from 3 Torr down to 10-3 Torr. The Lx extends the optical RGA range down to 10-7 matching the lower pressures of many traditional RGA's while also reaching pressures where those RGAs would require differential pumping.
The Lx was introduced in 2026 as a compliment to the L3. The Lx replaces standard RGA's -which use ion fragmentation- with an
optical emission spectrometer.. Since it does not use a filament the reliability is significantly improved while adding much better chemical resistance in many gas environments. The L3 operates at pressures from 3 Torr down to 10-3 Torr. The Lx extends the optical RGA range down to 10-7 matching the lower pressures of many traditional RGA's while also reaching pressures where those RGAs would require differential pumping.