L I G H T W I N D
Look Closer
We work with light to provide real time chemistry
insight for monitoring, control , endpoint, leak
detection, and analysis of vacuum processes
such as CVD, ALD, Etch and Sputtering.
The new Lx extends gas analysis to 10-8 Torr
and can, using optical emission spectroscopy,
replace traditional Residual Gas Analyzers
We work with light to provide real time chemistry
insight for monitoring, control , endpoint, leak
detection, and analysis of vacuum processes
such as CVD, ALD, Etch and Sputtering.
The new Lx extends gas analysis to 10-8 Torr
and can, using optical emission spectroscopy,
replace traditional Residual Gas Analyzers
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