Using reflectometry the thickness of different films types can be measured. There is a dependence on the wavelength of incident light on the thickness of the film to be measured. For example very thin films require using wavelengths toward the UV region, whereas much thicker films are more accurately measured with longer wavelengths found in the Near Infrared region.
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The range of film thickness that can be measured vs the spectral band is shown on the left. That range spans sub 10 nanometers to > 100 microns
The manual system incorporates a stage/sample holder and integrated light source and spectrometer (appropriate to the film thicknesses to be measured). Included software has an existing library of both films and film stacks. New algorithms can be created fairly easily.
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