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Lx Residual Gas Analyzer

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The Lx is an optical residual gas analyzer that operates from 8 x 10 - 8 to 1 x 10 - 2 Torr. A ccd spectrometer is used for identification of gases and concentrations and the information can be used for process troubleshooting, leak detection, and process monitoring. The Lx is a complete spectroscopy system but can also be an upgrade to select pressure sensors

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CONTACT US
  • L I G H T W I N D
  • SOLUTIONS
    • Semiconductor >
      • Plasma and Wet Etch Process Endpoint >
        • Wet Etch Endpoint
    • Plasma Spectroscopy >
      • Plasma Spectroscopy Systems
  • PRODUCTS
    • Plasma, CVD, ALD Gas Analysis >
      • L Series Applications
      • L Series: Downstream Process Spectroscopy
      • Lx Residual Gas Analyzer
      • S Series: Window Mount
    • Flow Cells
    • Software
  • SERVICES
    • Custom Engineering
  • RESOURCES
    • Lightwind Software Instructional Videos >
      • Configuring and Viewing Data
      • Template and Recipe Operations
      • Endpoint
  • CONTACT
    • ABOUT US