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Lightwind Onsite Process Survey
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Lightwind Onsite Survey for process diagnostics and analysis. Useful for evaluation of
existing vacuum based processes, either etch or deposition. CVD cleans can be evaluated
for gas usage, overetch or out of run conditions. Seasoning processes can be optimized. The L3 can also be used for etch process endpoints with capability for open areas > 1% exposed.
The site visit is designed around the customers specific application needs and includes a summary of the results and a copy of the collected data.
existing vacuum based processes, either etch or deposition. CVD cleans can be evaluated
for gas usage, overetch or out of run conditions. Seasoning processes can be optimized. The L3 can also be used for etch process endpoints with capability for open areas > 1% exposed.
The site visit is designed around the customers specific application needs and includes a summary of the results and a copy of the collected data.