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Copyright 2011 Lightwind Corporation |
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About Us |
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Intelligent Sensor and Technology Solutions |
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S1 |
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S2 |
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S3 |
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The Lightwind S1 is a portable spectroscopy system designed for data collection and process analysis. The system includes a 2048 pixel spectrometer, with a resolution of 1.3 nm, and a spectral range of 200 to 850 nm. LIghtwind software adapted for a Netbook computer is loaded on the included Netbook. Also included is a UV resistant fiber optic cable and a simple mount for the fiber optic cable to a window allowing quick installation and setup. Lightwind software provides both full spectra and selected channel data storage. Files can be viewed on the included viewer which allows play back of full spectra as well as selected single wavelengths over large time periods. |
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The S2 system is designed for either portable use or integration into a tool for continuous process monitoring. The S2 includes a 2048 pixel spectrometer, with 1.3 nm resolution and range from 200 to 850 nm. The S2 includes a solarization resistant fiber optic cable, computer, a custom window mount for the optical fiber with large area collection lens, and the full version of Lightwind software. This system can be tool integrated and provides an excellent upgrade for endpoint on legacy process tools. |
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The S3 is designed for more demanding process work. The spectrometer has enhanced sensitivity in the UV as well as high signal to noise detection. With 2048 pixels and a resolution about 1 nm the spectral range from 200 to 850 nm can be captured in milliseconds. The S3 was designed to detect very weak process (endpoint) signals . The system includes a computer, solarization resistant fiber optic cable, custom window mount with collection lens, and the full version of Lightwind Process Software. Also included is the Lightwind dual data viewer which allows easy overlay of two spectra form separate files, making chamber matching or comparison of different plasma conditions simple. |
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Endpoint Sensitivity For Different Exposed Surface Areas (chemical concentration) changes in time. |
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Portable Spectroscopy System |
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Process Spectroscopy System |
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Process Spectroscopy System |
