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· Detects leaks, precursor flow errors, endpoint, used for process monitoring and fault detection with a wide pressure operating range of 10 mTorr to 10 Torr without differential pumping · Ideal for all vacuum processes where no light is emitted, designed for continuous operation · Reliable and cost effective replacement for RGA in many cases
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Lightwind L3 with Inductively Coupled Plasma Source, Fiberoptic Cable and Spectrometer |
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Copyright 2011 Lightwind Corporation |
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NF3 Clean Endpoint: Increasing Fluorine |
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Simulated TemaHf flow failure detected
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Process Steady State |
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Process Initiation |
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Process Fault
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About Us |
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Overview |
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Intelligent Sensor and Technology Solutions |
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Lightwind Lx3 with Hollow Cathode Plasma Source, Fiberoptic Cable and Spectrometer |
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The Lightwind L3 includes: A 2048 pixel 1.3 nm resolution spectrometer, with enhanced S/N and sensitivity in the UV. Spectral range 200-850 nm. Lightwind control/data logging, monitoring software. Lightwind Data viewer software. RF Power supply and ICP for long life, Computer (available in several configurations). |
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· Application set similar to L3 except that the pressure range is .1 to 2.5 Torr, no differential pumping is required · Ideal for all vacuum processes where no light is emitted, designed for continous operation · Smaller size allows easier portability and installation
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The Lightwind Lx3 includes: A 2048 pixel 1.3 nm resolution spectrometer with detection from 200-850 nm. Lightwind control/data logging, monitoring software. RF Power supply and HC plasma source for long life. Computer (available in several configurations). |
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L3 |
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Lx3 |
