Products

Text Box: ICP OES Chemical sensor for CVD, ALD, and Etch. Because the L3 has its own plasma light source it will work with almost all vacuum processes. It is sensitive enough for critical endpoint, and reproducible enough for manufacturing fault detection.

Text Box: OES (Optical Emission Spectroscopy) Multichannel spectrometer that collects light over the full spectral range from UV to Near Infrared. These sensors can be used for through window spectroscopy for processes that emit light. They are an excellent endpoint upgrade for legacy process tools that need more sensitive and reliable endpoint capability to match next generation process requirements. Spectrometers can be tuned for maximum application sensitivity.

L i g h t w i n d S3

Text Box: Ocean Optics has a large selection of selection of spectrometers and accessories that range from educational systems to high resolution low noise detectors from UV to Infrared to Raman.

O c e a n O p t i c s S e n s o r s a n d S y s t e m s

Text Box: Lightwind products can be used for non critical as well as critical thin film measurements using reflectometry, and ellipsometery. In addition Libs and Lamps can provide accurate, rapid chemical composition measurements.

M e t r o l o g y

Products

Text Box: Lightwind offers a large variety of spectroscopy solutions ranging from standard optical emission to fluorescence ,and from UV to Infrared. Application specific spectrometers, such as the NeoFox, provide direct accurate readout of gas phase or dissolved oxygen.

C h e m i c a l S e n s o r s

Copyright 2010

Lightwind Corporation

For more information: info@Lightwindcorp.com

Text Box: Lighwind can provide different levels of sensor integration with the process tool and the factory. Starting with the simplest level which includes SECS based synchronization to more sophisticated integration including automatic fault detection at the tool level.

L i g h t w i n d V e c t o r S o f t w a r e

Overview

Intelligent Sensor and Technology Solutions