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Process Chemistry Map for TiN Deposition showing 5 deposition steps followed by the start of an idle cycle. |
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About Us |
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Lightwind was started in 2001 with its first product, the L3, designed to provide critical chemical information about process conditions. Processes such as ALD or ClF3 cleans are examples of environments where the L3 is unaffected by continuous operation, and the L3 is able to provide process insight that is not reliably available from any other sensor. For example, in ALD alone Lightwind has over 600,000 hours of 24 x 7 manufacturing time with the L3. The second OES capability added to Lightwind solutions was the S3, a more traditional spectroscopy, for chemical processes that naturally emit light. Through developing our technology and applications Lightwind has been awarded multiple patents in the United States as well as throughout the world. July 2009 Lightwind became a distributor for Ocean Optics products on the West Coast. With that expanded range of products Lightwind can now offer a variety of sensors and automation solutions for a variety of industries including: Semiconductor R & D, Semiconductor Manufacturing LED Test and Manufacturing Solar Cell Test and Manufacturing Biochemical Test and Manufacturing
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Copyright 2010 Lightwind Corporation |
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This is a 3D map for 5 oxide etch wafers. The plot show frequency vs voltage vs time. |
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San Francisco, California January 23 - 24, 2010 Booth #8600 Website
Photonics West San Francisco, California January 26 - 28, 2010 Booth #1431 (South H) Website
MD&M Anaheim, California February 9 - 11, 2010 Booth #1777 Website
Strategies in Light Santa Clara, California February 10 - 12, 2010 Booth #803 Website |
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Intelligent Sensor and Technology Solutions |