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Copyright 2010 Lightwind Corporation |
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L3 |
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Chamber |
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S3 |
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Turbo |
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RF for ICP |
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Computer |
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For more information: info@Lightwindcorp.com |
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Applications |
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Diagnostic Package |
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Cross section of process chamber showing sensor installation nodes. The Lightwind Diagnostic system incorporates 2 or more sensors in a portable format for chamber matching or longer term process characterization such as base lining and chamber matching. |
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Factory Data Base |
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Intelligent Sensor and Technology Solutions |